systems (MEMS) (also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic
and microelectromechanical systems and the related micromechatronics) is the technology of very
small devices; it merges at the nano-scale into nanoelectromechanical systems (NEMS) and
nanotechnology. MEMS are also referred to as micromachines (in Japan), or micro systems
technology – MST (in Europe)." -
MEMs Manufactures & Services
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|A Critical Review of MEMS Gyroscopes Technology and Commercialization Status |
Abstract by Steven Nasiri.
About MEMS | allaboutmems.com
A community-oriented website devoted to the full
range of information available about MicroElectoMechanical Systems.
on MEMS-Based Storage, Its Research Issues and Open Problems | whitepapers.silicon.com/0,39024759,60297258p,00.htm
Free download from silicon.com.
A Product Engineering Framework for MEMS IP
Development | zdnet.com.au/whitepaper/0,2000063328,22127899p-16001355q,00.htm
paper from ZDNet.
Beyond Corporate Walls: Symbol Mesh Networks | whitepapers.zdnet.com/whitepaper.aspx?docid=243132
White paper from ZDNet.
Caltech Micromachining Laboratory | mems.caltech.edu
The Micromachining Laboratory's research interests include MEMS technology,
microsensors, microactuators, microstructure, MEMS systems, and MEMS science.
Carbon Fiber MEMS Micromirrors | memsinfo.jp/whitepaper/730.pdf
from Mezmeriz, Inc.
Crableg Resonator Tutorial | ece.cmu.edu/~mems/projects/matisse/crableg1.shtml
This tutorial provides an overview of the series of steps from the design of a crableg
resonator through the testing of the same bonded die.
Current Trends in Optical
MEMS | eecs.berkeley.edu/~wu/Presentations/ofc2005.pdf
Tutorial by Ming C. Wu,
University of California, Berkeley.
DMD Reliability: A MEMS Success Story |
Abstract by Michael R. Douglass,
Fabless MEMS | smalltimes.com/webcast/display_webcast.cfm?id=336
On demand webcast from Small Times.
Georgia Tech MEMS Home Page | mems.gatech.edu
Describes some of the activities of the Microsensor and Microactuator Group at Georgia
MEMS and Nanotechnology Clearinghouse | memsnet.org/mems
Nanotechnology applications, definition, fabrication, challenges, processes, discussion
MEMS Fabrications for Wireless Communications Using Copper Interconnect
Technology | whitepapers.zdnet.co.uk/0,1000000651,260132332p,00.htm
|MEMS Industry Group (MIG) | memsindustrygroup.org
412.390.1MIG (1644) | Pittsburgh,
the unifying voice of the commercial MEMS community, representing those companies
with the goal of making money in the MEMS market. By providing forums for information
exchange and collaboration we create the horizontal band across the broad range of
companies supporting and utilizing MEMS technology.
MEMS Special Packaging
Needs | flipchips.com/tutorial36.html
Tutorial by Ken C.
MEMS Tutorial |
Definition, how it works, applications, from
the WAVE Report.
National Institute of Standards & Technology | mems.nist.gov
Mission: To stimulate economic growth through technology, measurements, and standards.
Opto-Micro-Electro-Mechanical Systems (OMEMS) | ee.stanford.edu/~harris/O-MEMS_Tutorial.pdf
Tutorial by J.S. Harris, Stanford University.
Systems (MEMS) | computerworld.com/action/article.do?command=viewArticleBasic&articleId=282839
Article from ComputerWorld.
Science of the Small | mae.pennnet.com/articles/article_display.cfm?article_id=294946
Miniature MEMS and nanotechnology devices solve challenges in defense, security, and
aerospace applications. Article by Courtney E. Howard.
There's More to MEMS
Than Meets the iPhone | eetimes.com/showArticle.jhtml?articleID=200900669
Colin Johnson, from EETimes.
The Scaling of Micromechanical Devices | home.earthlink.net/~trimmerw/mems/Scale.html
This material is adapted from the article “Microrobots and Micromechanical Systems”
by W. S. N. Trimmer.
Tutorial on Micro Electro Mechanical Systems (MEMS) |
4.eas.asu.edu/PowerZone/EPNES/EPNES Tutorial on MEMS_BK.pdf
By Bruce Kim Department
of Electrical Engineering, Arizona State University.
Tutorial on Micromechanics
and MEMS | home.earthlink.net/~trimmerw/mems/tutorials.html
relating to Micromechanics & MEMS.
Using SolidWorks & COSMOS/Works
for MEMS Designs | memsinfo.jp/whitepaper/763.pdf
SolidWorks White Paper by Craig
Wikipedia | en.wikipedia.org/wiki/MEMS
systems (MEMS) definition, information, and links.