"Microelectromechanical systems (MEMS) (also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems and the related micromechatronics) is the technology of very small devices; it merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology. MEMS are also referred to as micromachines (in Japan), or micro systems technology – MST (in Europe)." - Wikipedia
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A Critical Review of MEMS Gyroscopes Technology and Commercialization Status | invensense.com/shared/pdf/MEMSGyroComp.pdf
Abstract by Steven Nasiri.
All About MEMS | allaboutmems.com
A community-oriented website devoted to the full range of information available about MicroElectoMechanical Systems.
An Overview on MEMS-Based Storage, Its Research Issues and Open Problems | whitepapers.silicon.com/0,39024759,60297258p,00.htm
Free download from silicon.com.
A Product Engineering Framework for MEMS IP Development | zdnet.com.au/whitepaper/0,2000063328,22127899p-16001355q,00.htm
White paper from ZDNet.
Beyond Corporate Walls: Symbol Mesh Networks | whitepapers.zdnet.com/whitepaper.aspx?docid=243132
White paper from ZDNet.
Caltech Micromachining Laboratory | mems.caltech.edu | Pasadena, CA
The Micromachining Laboratory's research interests include MEMS technology, microsensors, microactuators, microstructure, MEMS systems, and MEMS science.
Carbon Fiber MEMS Micromirrors | memsinfo.jp/whitepaper/730.pdf
Whitepaper from Mezmeriz, Inc.
Crableg Resonator Tutorial | ece.cmu.edu/~mems/projects/matisse/crableg1.shtml
This tutorial provides an overview of the series of steps from the design of a crableg resonator through the testing of the same bonded die.
Current Trends in Optical MEMS | eecs.berkeley.edu/~wu/Presentations/ofc2005.pdf
Tutorial by Ming C. Wu, University of California, Berkeley.
DMD Reliability: A MEMS Success Story | focus.ti.com/download/dlpdmd/153_Reliability_paper.pdf
Abstract by Michael R. Douglass, Texas Instruments.
Fabless MEMS | smalltimes.com/webcast/display_webcast.cfm?id=336
On demand webcast from Small Times.
Georgia Tech MEMS Home Page | mems.gatech.edu
Describes some of the activities of the Microsensor and Microactuator Group at Georgia Tech.
MEMS and Nanotechnology Clearinghouse | memsnet.org/mems
MEMS and Nanotechnology applications, definition, fabrication, challenges, processes, discussion groups.
MEMS Fabrications for Wireless Communications Using Copper Interconnect Technology | whitepapers.zdnet.co.uk/0,1000000651,260132332p,00.htm
White paper from ZDNet.
MEMS Industry Group (MIG) | memsindustrygroup.org | 412.390.1MIG (1644) | Pittsburgh, PA
the unifying voice of the commercial MEMS community, representing those companies with the goal of making money in the MEMS market. By providing forums for information exchange and collaboration we create the horizontal band across the broad range of companies supporting and utilizing MEMS technology.
MEMS Special Packaging Needs | flipchips.com/tutorial36.html
Tutorial by Ken C.
MEMS Tutorial | wave-report.com/tutorials/MEMS.htm
Definition, how it works, applications, from the WAVE Report.
National Institute of Standards & Technology | mems.nist.gov
Mission: To stimulate economic growth through technology, measurements, and standards.
Opto-Micro-Electro-Mechanical Systems (OMEMS) | ee.stanford.edu/~harris/O-MEMS_Tutorial.pdf
Tutorial by J.S. Harris, Stanford University.
QuickStudy: MicroElectroMechanical Systems (MEMS) | computerworld.com/action/article.do?command=viewArticleBasic&articleId=282839
Article from ComputerWorld.
Science of the Small | mae.pennnet.com/articles/article_display.cfm?article_id=294946
Miniature MEMS and nanotechnology devices solve challenges in defense, security, and aerospace applications. Article by Courtney E. Howard.
There's More to MEMS Than Meets the iPhone | eetimes.com/showArticle.jhtml?articleID=200900669
By R. Colin Johnson, from EETimes.
The Scaling of Micromechanical Devices | home.earthlink.net/~trimmerw/mems/Scale.html
This material is adapted from the article “Microrobots and Micromechanical Systems” by W. S. N. Trimmer.
Tutorial on Micro Electro Mechanical Systems (MEMS) | 4.eas.asu.edu/PowerZone/EPNES/EPNES Tutorial on MEMS_BK.pdf
By Bruce Kim Department of Electrical Engineering, Arizona State University.
Tutorial on Micromechanics and MEMS | home.earthlink.net/~trimmerw/mems/tutorials.html
Tutorial information relating to Micromechanics & MEMS.
Using SolidWorks & COSMOS/Works for MEMS Designs | memsinfo.jp/whitepaper/763.pdf
SolidWorks White Paper by Craig M. Schiller.
Wikipedia | en.wikipedia.org/wiki/MEMS
Microelectromechanical systems (MEMS) definition, information, and links.