MEMs Resources

"Microelectromechanical systems (MEMS) (also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems and the related micromechatronics) is the technology of very small devices; it merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology. MEMS are also referred to as micromachines (in Japan), or micro systems technology – MST (in Europe)." - Wikipedia

MEMs Manufactures & Services



A Critical Review of MEMS Gyroscopes Technology and Commercialization Status |
Abstract by Steven Nasiri.

All About MEMS |
A community-oriented website devoted to the full range of information available about MicroElectoMechanical Systems.

An Overview on MEMS-Based Storage, Its Research Issues and Open Problems |,39024759,60297258p,00.htm
Free download from

A Product Engineering Framework for MEMS IP Development |,2000063328,22127899p-16001355q,00.htm
White paper from ZDNet.

Beyond Corporate Walls: Symbol Mesh Networks |
White paper from ZDNet.

Caltech Micromachining Laboratory | | Pasadena, CA
The Micromachining Laboratory's research interests include MEMS technology, microsensors, microactuators, microstructure, MEMS systems, and MEMS science.

Carbon Fiber MEMS Micromirrors |
Whitepaper from Mezmeriz, Inc.

Crableg Resonator Tutorial |
This tutorial provides an overview of the series of steps from the design of a crableg resonator through the testing of the same bonded die.

Current Trends in Optical MEMS |
Tutorial by Ming C. Wu, University of California, Berkeley.

DMD Reliability: A MEMS Success Story |
Abstract by Michael R. Douglass, Texas Instruments.

Fabless MEMS |
On demand webcast from Small Times.

Georgia Tech MEMS Home Page |
Describes some of the activities of the Microsensor and Microactuator Group at Georgia Tech.

MEMS and Nanotechnology Clearinghouse |
MEMS and Nanotechnology applications, definition, fabrication, challenges, processes, discussion groups.

MEMS Fabrications for Wireless Communications Using Copper Interconnect Technology |,1000000651,260132332p,00.htm
White paper from ZDNet.

MEMS Industry Group (MIG) | | 412.390.1MIG (1644) | Pittsburgh, PA
the unifying voice of the commercial MEMS community, representing those companies with the goal of making money in the MEMS market. By providing forums for information exchange and collaboration we create the horizontal band across the broad range of companies supporting and utilizing MEMS technology.

MEMS Special Packaging Needs |
Tutorial by Ken C.

MEMS Tutorial |
Definition, how it works, applications, from the WAVE Report.

National Institute of Standards & Technology |
Mission: To stimulate economic growth through technology, measurements, and standards.

Opto-Micro-Electro-Mechanical Systems (OMEMS) |
Tutorial by J.S. Harris, Stanford University.

QuickStudy: MicroElectroMechanical Systems (MEMS) |
Article from ComputerWorld.

Science of the Small |
Miniature MEMS and nanotechnology devices solve challenges in defense, security, and aerospace applications. Article by Courtney E. Howard.

There's More to MEMS Than Meets the iPhone |
By R. Colin Johnson, from EETimes.

The Scaling of Micromechanical Devices |
This material is adapted from the article “Microrobots and Micromechanical Systems” by W. S. N. Trimmer.

Tutorial on Micro Electro Mechanical Systems (MEMS) | Tutorial on MEMS_BK.pdf
By Bruce Kim Department of Electrical Engineering, Arizona State University.

Tutorial on Micromechanics and MEMS |
Tutorial information relating to Micromechanics & MEMS.

Using SolidWorks & COSMOS/Works for MEMS Designs |
SolidWorks White Paper by Craig M. Schiller.

Wikipedia |
Microelectromechanical systems (MEMS) definition, information, and links.