"Microelectromechanical systems (MEMS) (also written as micro-electro-mechanical,
MicroElectroMechanical or microelectronic and microelectromechanical
systems and the related micromechatronics) is the technology of
very small devices; it merges at the nano-scale into nanoelectromechanical
systems (NEMS) and nanotechnology. MEMS are also referred to as
micromachines (in Japan), or micro systems technology – MST (in
MEMs Manufactures & Services
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A Critical Review of MEMS Gyroscopes Technology and Commercialization
Status | invensense.com/shared/pdf/MEMSGyroComp.pdf
Abstract by Steven Nasiri.
All About MEMS | allaboutmems.com
website devoted to the full range of information available about
An Overview on MEMS-Based Storage, Its Research Issues
and Open Problems | whitepapers.silicon.com/0,39024759,60297258p,00.htm
Free download from silicon.com.
A Product Engineering Framework for MEMS IP Development
White paper from ZDNet.
Beyond Corporate Walls: Symbol Mesh Networks
Caltech Micromachining Laboratory | mems.caltech.edu
| Pasadena, CA
The Micromachining Laboratory's research interests
include MEMS technology, microsensors, microactuators, microstructure,
MEMS systems, and MEMS science.
Carbon Fiber MEMS Micromirrors | memsinfo.jp/whitepaper/730.pdf
Whitepaper from Mezmeriz, Inc.
Crableg Resonator Tutorial | ece.cmu.edu/~mems/projects/matisse/crableg1.shtml
This tutorial provides an overview of the series of steps from the
design of a crableg resonator through the testing of the same bonded
Current Trends in Optical MEMS | eecs.berkeley.edu/~wu/Presentations/ofc2005.pdf
Tutorial by Ming C. Wu, University of California, Berkeley.
DMD Reliability: A MEMS Success Story | focus.ti.com/download/dlpdmd/153_Reliability_paper.pdf
Abstract by Michael R. Douglass, Texas Instruments.
Fabless MEMS | smalltimes.com/webcast/display_webcast.cfm?id=336
On demand webcast from Small Times.
Georgia Tech MEMS Home Page | mems.gatech.edu
Describes some of the activities of the Microsensor and Microactuator
Group at Georgia Tech.
MEMS and Nanotechnology Clearinghouse | memsnet.org/mems
MEMS and Nanotechnology applications, definition, fabrication, challenges,
processes, discussion groups.
MEMS Fabrications for Wireless Communications Using Copper
Interconnect Technology | whitepapers.zdnet.co.uk/0,1000000651,260132332p,00.htm
White paper from ZDNet.
MEMS Industry Group (MIG) | memsindustrygroup.org
| 412.390.1MIG (1644) | Pittsburgh, PA
the unifying voice of
the commercial MEMS community, representing those companies with
the goal of making money in the MEMS market. By providing forums
for information exchange and collaboration we create the horizontal
band across the broad range of companies supporting and utilizing
MEMS Special Packaging Needs | flipchips.com/tutorial36.html
Tutorial by Ken C.
MEMS Tutorial | wave-report.com/tutorials/MEMS.htm
Definition, how it works, applications, from the WAVE Report.
National Institute of Standards & Technology
Mission: To stimulate economic growth through
technology, measurements, and standards.
Opto-Micro-Electro-Mechanical Systems (OMEMS)
Tutorial by J.S.
Harris, Stanford University.
QuickStudy: MicroElectroMechanical Systems (MEMS)
Article from ComputerWorld.
Science of the Small | mae.pennnet.com/articles/article_display.cfm?article_id=294946
Miniature MEMS and nanotechnology devices solve challenges in defense,
security, and aerospace applications. Article by Courtney E. Howard.
There's More to MEMS Than Meets the iPhone |
By R. Colin
Johnson, from EETimes.
The Scaling of Micromechanical Devices | home.earthlink.net/~trimmerw/mems/Scale.html
This material is adapted from the article “Microrobots and Micromechanical
Systems” by W. S. N. Trimmer.
Tutorial on Micro Electro Mechanical Systems (MEMS)
| 4.eas.asu.edu/PowerZone/EPNES/EPNES Tutorial on MEMS_BK.pdf
By Bruce Kim Department of Electrical Engineering, Arizona State
Tutorial on Micromechanics and MEMS | home.earthlink.net/~trimmerw/mems/tutorials.html
Tutorial information relating to Micromechanics & MEMS.
Using SolidWorks & COSMOS/Works for MEMS Designs
SolidWorks White Paper by Craig
Wikipedia | en.wikipedia.org/wiki/MEMS
systems (MEMS) definition, information, and links.