Comdel Press Release - March 30, 2009
The CPMX1000 system is engineered with Comdel's unique PROTRAK, a high-speed tuning algorithm that gradually slows the system as it approaches the tuning point, allowing a precise match even in high "Q" loads. This proportional control circuitry illustrates the critical difference between Comdel's Match Pro and other matching networks. The Match Pro adjusts input impedance to 50 Ohms quickly, accurately and dependably--in response to the changes in load characteristics during your process. The CPMX1000 is configured to operate at fixed frequencies from 2 to 27.12 MHz and features automatic and manual modes with local and remote manual control of tuning capacitors, and the ability to preposition capacitors to the optimal plasma ignition point prior to turn on, resulting in quick and reliable tuning.
Frequency range: Configured to operate at fixed frequencies from 2 to 27.12 MHz
RF Power Range: 25 W- 1250 W
RF Output Current: 20 A Max.
Line input: 100-240 VAC; single phase; 50/60 Hz; or 24 VDC
VSWR: Typically less than 1.5 to 1 in a 50-Ohm system
Cooling: Forced air cooling. Operating ambient temperature range is -10 to +35° C
Mounting: The Match Pro unit must be mounted close to the chamber
for optimum performance. Custom mounting configurations can be accommodated.
Size: 5.5"H x 10"W x 15"D (138 mm x 254 mm x 375 mm)
Weight: 12 lbs (5.5 kg)
Options: CPMX Remote with RS-232 interface, analog, or DeviceNET control.
About Comdel, Inc.
Comdel, headquartered in Gloucester, Massachusetts, designs, develops and manufactures innovative, high quality RF and DC power systems for leading companies in semiconductor, solar, metal heat-treating, dielectric heating, medical lasers, and thin film markets. Its RF power systems offer the market's best power and frequency range, and are backed by an industry-leading research and development design department. To provide customers with support when and where they need it, Comdel maintains offices in the US, UK, Korea, Southeast Asia, and Japan. Comdel is ISO 9001:2000 certified.
For further information contact:
1 Kondelin Road
Gloucester, MA 01930
Phone: 978-282-0620 or 800-468-3144
Web site: www.comdel.com
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