Comdel - Press Release 9-24-2008


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CDX Dual High Frequency Power Supply

New Product Announcement!!


CDX Dual High Frequency Power Supply

Comdel’s CDX dual frequency power supply is now available in dual high frequency sections. With a 1200 or 2000 Watt design, the high frequency (HF) section of the CDX provides 600 or 1000 Watts of power, with optional frequencies from 2 to 60 MHz. The former low frequency (LF) section can deliver 600 or 1000 Watts, now with an optional fixed or variable frequency of 13.56 MHz. Making the CDX series available with dual high frequency sections provides more flexibility for plasma applications including bias, etch, deposition and ashing in semiconductor processing, as well as solar cell and photovoltaic applications.

Specifications:
AC input voltage/current: 187-229 VAC; three phase; 50/60 Hz/ 20A
Analog setpoint and readback levels: 0-10VDC for 0-100% rated power
Over-temperature fault: Output disabled when heatsink temp exceeds 60 degrees C
Control signals' input impedance: 100k Ohms, minimum
Output power control linearity: 2% or better
Forward/Delivered power regulation: +/- 2% of setpoint for load var. within VSWR foldback limits
Load mismatch: Output limited to 200 Watts under high VSWR conditions
Line regulation: +/- 1% output change over 187-229VAC line voltage
Control I/O connector: 15-pin subminiature D type
Standard available output connector: N or C
Cooling: CDX 1000: 1 GPM (3.8 L) CDX 2000: 1.5 GPM (5.7 L)
Size: 7"H x 19"W x 19"D (17.8cm x 48.3cm x 48.3cm)
Weight: 97 lbs. (44 kg)

For further information contact

MaryBeth Masterson
Marketing Manager
Comdel
11 Kondelin Road
Gloucester, MA  01930
Phone: 978-282-0620 or 800-468-3144
Fax: 978-282-4980
Email: marybeth_masterson@comdel.com
Web site: www.comdel.com
 

Comdel, Inc.
11 Kondelin Road
Gloucester, MA 01930
p: 978.282.0620
f: 978.282.4980
www.comdel.com
New Product Announcement!!